장비의 선택

지우기술의 진공승화정제장비는 대표적으로 Diffusion Pump + Oil Rotary Pump 조합과 Turbo Molecular Pump + Dry Pump의 조합으로 크게 나눌 수 있으며, 사용 Trap의 종류에 따라 세분된다.
아래 표를 참조하여 모델을 결정한다.

1) Turbo Molecular Pump + Dry Pump

Model ZPS-300T ZPS-300T-C1 ZPS-300T-C2 ZPS-300T-V2
Pump Turbo Molecular Pump + Dry Pump
Vacuum Degree under 7 x 10-7 Torr, no loading
Quartz Outer Tube 50, 80, 100, 120, 150, 200, 250, 300(mm), Inner Diameter
Trap In- Line Cooling
Water Trap, only
Refrigerant Single Trap(-40℃) + In-Line Trap Refrigerant In-Line Trap(-40℃)
Only
LN2 Single Trap
(-196℃)
+ In-Line Trap
Temperature Inside Temperature Measuring Tool
Over Heating; within 1℃, Cross-sectional Uniformity(at 400℃); within ±2℃ average

2) Diffusion Pump + Oil Rotary Pump

Model ZPS-300D ZPS-300D-V1 ZPS-300D-V2 ZPS-300D-C1
Pump Diffusion Pump with Baffle + Oil Rotary Pump
Vacuum Degree under 3 x 10-6 Torr, no loading
Quartz Outer Tube 50, 80, 100, 120, 150, 200, 250, 300(mm), Inner Diameter
Trap LN2 Single Trap(-196℃),
Manual Up/Down
LN2 Dual Trap(-196℃),
Auto Up/Down
LN2 Single Trap(-196℃),
Auto Up/Down
+ In-Line Trap
Refrigerant Single Trap(-40℃)
Auto Up/Down
+ In-Line Trap
Temperature Over Heating; within 1℃, Cross-sectional Uniformity(at 400℃); within ±2℃ average, Inside Temperature Measuring Tool

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