Equipment Selection
Ziwoo Technology’s Vacuum Sublimation System can be broadly classified into a combination of Diffusion Pump + Oil Rotary Pump and the combination of Turbo Molecular Pump + Dry Pump. These are subdivided according to the type of used trap and the model can be selected by referring to the chart below.
1) Turbo Molecular Pump + Dry Pump
Model | ZPS-300T | ZPS-300T-C1 | ZPS-300T-C2 | ZPS-300T-V2 |
Pump | Turbo Molecular Pump + Dry Pump | |||
Vacuum Degree | under 7 x 10-7 Torr, no loading | |||
Quartz Outer Tube | 50, 80, 100, 120, 150, 200, 250, 300(mm), Inner Diameter | |||
Trap | In- Line Cooling Water Trap, only |
Refrigerant Single Trap(-40℃) + In-Line Trap | Refrigerant In-Line Trap(-40℃) Only |
LN2 Single Trap (-196℃) + In-Line Trap |
Temperature | Inside Temperature Measuring Tool Over Heating; within 1℃, Cross-sectional Uniformity(at 400℃); within ±2℃ average |
2) Diffusion Pump + Oil Rotary Pump
Model | ZPS-300D | ZPS-300D-V1 | ZPS-300D-V2 | ZPS-300D-C1 |
Pump | Diffusion Pump with Baffle + Oil Rotary Pump | |||
Vacuum Degree | under 3 x 10-6 Torr, no loading | |||
Quartz Outer Tube | 50, 80, 100, 120, 150, 200, 250, 300(mm), Inner Diameter | |||
Trap | LN2 Single Trap(-196℃), Manual Up/Down |
LN2 Dual Trap(-196℃), Auto Up/Down |
LN2 Single Trap(-196℃), Auto Up/Down + In-Line Trap |
Refrigerant Single Trap(-40℃) Auto Up/Down + In-Line Trap |
Temperature | Over Heating; within 1℃, Cross-sectional Uniformity(at 400℃); within ±2℃ average, Inside Temperature Measuring Tool |